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The Effect of Post Deposition Treatment on Properties of ALD Al-Doped ZnO Films.

Nanomaterials (Basel) · 2023 · PMC10005121 · PMID 36903677

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a slightly increasing trendno p-value reported
The RMS roughness of the annealed AZO presents a slightly increasing trend compared to the as-deposited one, reflecting the increased average grain size which was also observed through XRD analysis. 3.4.

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