Impact of Stress and Dimension on Nanosheet Deformation during Channel Release of Gate-All-Around Device.

Micromachines (Basel) · 2023 · PMC10058282 · PMID 36985018

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an obvious trendno p-value reported

An obvious trend could be observed in the figures: the nanosheets displacement values increase for longer nanosheets, consistent with the conclusion obtained in Experiment A.

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