Room Temperature Incorporation of Arsenic Atoms into the Germanium (001) Surface.

Angew Chem Int Ed Engl · 2023 · PMC10108107 · PMID 36484458

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extremely significantno p-value reported

Our results are extremely significant in the context of atomic‐scale donor device fabrication as they suggest a solution to the donor incorporation probability problem that currently severely limits the scale‐up of phosphorus in silicon devices to large numbers of qubits.

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