Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers.

Micromachines (Basel) · 2023 · PMC10609305 · PMID 37893307

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a decreasing trendno p-value reported

The fundamental mode wavelength is negatively correlated with the size of the air hole, and the overall Q factor shows a decreasing trend with the increase of the slit width s, but the fluctuation is not significant.

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