Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method.

Micromachines (Basel) · 2023 · PMC10609439 · PMID 37893378

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closest p

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an increasing trendno p-value reported

The static transmitting sensitivity shows an increasing trend with increasing the Sc doping concentration, and the variation is significant.

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