Electric-Force Conversion Performance of Si-Based LiNbO3 Devices Based on Four Cantilever Beams

Micromachines (Basel) · 2023 · PMC10672825

Europe PMC

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an increasing trendno p-value reported

Figure 4 e shows the modal distribution of displacement on mass block surface with different amplitudes of AC voltage applied; with increasing voltage value, the displacement shows an increasing trend.

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