Investigation of PZT Materials for Reliable Piezostack Deformable Mirror with Modular Design

Key parameters that could be considered significant in actuation applications of the piezomaterial are mainly as follows: electromechanical coupling coefficients (k p , k 15 , k 33 , k 31 , k t ), piezoelectric modules (d 31 , d 33 , d 15 ), longitudinal ultrasonic wave velocities (V E 1 , V D 4 , V D 3 ), relative permittivity (ε T 33 /ε 0 and ε T 11 /ε 0 ), electrical capacitance, and resonance/antiresonance frequencies. 2.2.

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