Mechanism Exploration of the Effect of Polyamines on the Polishing Rate of Silicon Chemical Mechanical Polishing: A Study Combining Simulations and Experiments.

Nanomaterials (Basel) · 2024 · PMC10780713 · PMID 38202582

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a decreasing trendno p-value reported

The final N atom adsorption ratios of the five polyamines showed a decreasing trend with increasing chain length.

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