Optimization of Surface Acoustic Wave Resonators on 42°Y-X LiTaO<sub>3</sub>/SiO<sub>2</sub>/Poly-Si/Si Substrate for Improved Performance and Transverse Mode Suppression.

Micromachines (Basel) · 2023 · PMC10818995 · PMID 38276840

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a decreasing trendno p-value reported

It is obvious that the dummy length only had a marked impact on the S4 mode, which showed a decreasing trend as the dummy length monotonically increased. 3.3.

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