Characterization of Ceria Nanoparticles as Abrasives Applied with Defoaming Polymers for CMP (Chemical Mechanical Polishing) Applications.

Polymers (Basel) · 2024 · PMC10974854 · PMID 38543450

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an increasing trendno p-value reported

On the other hand, the conductivity increased to 231 μS/cm, 248 μS/cm, and 262 μS/cm, and the size also exhibited an increasing trend at 216 nm, 224 nm, and 232 nm, respectively.

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