Optimization of Graphical Parameter Extraction Algorithm for Chip-Level CMP Prediction Model Based on Effective Planarization Length.

Micromachines (Basel) · 2024 · PMC11051990 · PMID 38675360

Europe PMC DOI

hedged sentence

—

closest p

—

boldest claim

The sentences

an apparent trendno p-value reported

However, the topography of the transitional region between the arrays indicates an apparent trend, which is caused by the influence of different patterns on adjacent arrays.

also in 119 other papers

Quoted from the open-access full text in Europe PMC under the licence the publisher applied. The sentence is reproduced exactly as published; the emphasis is ours.