Depending on the nitrogen flow used for the deposition of ZrCeO x N y films, the cerium percentage deposited exhibits an increasing trend with the nitrogen flow (except for φN 2 = 35.0 sccm, where it decreases to 67% of Ce).
1
—
—
Depending on the nitrogen flow used for the deposition of ZrCeO x N y films, the cerium percentage deposited exhibits an increasing trend with the nitrogen flow (except for φN 2 = 35.0 sccm, where it decreases to 67% of Ce).