The global C 2 F 6 /CF 4 emission ratios exhibit a decreasing trend over 2011 to 2020, indicating a global shift toward a greater dominance of aluminum industry in CF 4 and C 2 F 6 emissions compared to the semiconductor (and flat-panel display) industries and/or the gradual replacement of C 2 F 6 by alternatives such as NF 3 in certain cleaning processes in the semiconductor industries ( 9 , 32 ).
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Substantial increase in perfluorocarbons CF<sub>4</sub> (PFC-14) and C<sub>2</sub>F<sub>6</sub> (PFC-116) emissions in China.
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