14 , keeping the temperature constant and under different deposition air pressures, the sp 2 hybridized structure in the Ni doped film gradually decreases with the increase of air pressure and voltage; while without Ni doping, the sp 2 hybridized structure in the film shows an overall trend of increasing with the increase of air pressure, and gradually less with the increase of voltage.
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Molecular dynamics simulation of hybrid structure and mechanical properties of DLC/Ni-DLC thin films.
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