Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity-Optimized Based on BP and NSGA-II Algorithms.

The error shows a decreasing trend as the length of the coupling beam increases, and the error can likewise be maintained in a small range.

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The error shows an increasing trend with the increase in the width of the resonant beam; the increase is large, and the error is minimal when the width of the resonant beam is 5 μm.

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