One-Step Dry-Etching Fabrication of Tunable Two-Hierarchical Nanostructures.

Micromachines (Basel) · 2024 · PMC11434419 · PMID 39337820

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a decreasing trendno p-value reported

A decreasing trend is observed with the RF power, meaning that the top edge of the nanostructures becomes sharper with the RF power.

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