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Capacitance-Voltage Fluctuation of Si<sub>x</sub>N<sub>y</sub>-Based Metal-Insulator-Metal Capacitor Due to Silane Surface Treatment.

Micromachines (Basel) · 2024 · PMC11509476 · PMID 39459078

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an increasing trendno p-value reported
Both the V cc 1 and V cc 2 values showed an increasing trend as the thickness decreased, with the initial level and degree of increase varying according to the condition.

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