Effect of Deposition Temperature on Zn Interstitials and Oxygen Vacancies in RF-Sputtered ZnO Thin Films and Thin Film-Transistors.

Materials (Basel) · 2024 · PMC11547206 · PMID 39517429

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a decreasing trendno p-value reported

Another parameter that defines the TFT performance is a sub-threshold swing (SS), which shows a decreasing trend from RT to high-temperature deposition.

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