Temperature Uniformity Control of 12-Inch Semiconductor Wafer Chuck Using Double-Wall TPMS in Additive Manufacturing.

Materials (Basel) · 2025 · PMC11720813 · PMID 39795856

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a decreasing trendno p-value reported

It was anticipated that under the same modeling conditions without geometric modifications, the Nusselt number would exhibit a decreasing trend. 3.

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