Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al<sub>0.8</sub>Sc<sub>0.2</sub>N.

Micromachines (Basel) · 2025 · PMC11857134 · PMID 40047723

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an increasing trendno p-value reported

With the advent of micro-electro-mechanical system (MEMS) technology in the late 1980s, MEMS devices possess the advantages of small size, light weight, and high reliability, thereby rendering the development of MEMS microphones an increasing trend [ 6 ].

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Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al&lt;sub&gt;0.8&lt;/sub&gt;Sc&lt;sub&gt;0.2&lt;/sub&gt;N.

The sentences

Design and Fabrication of a Piezoelectric Bimorph Microphone with High Reliability and Dynamic Range Based on Al<sub>0.8</sub>Sc<sub>0.2</sub>N.