A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control.

Micromachines (Basel) · 2025 · PMC11943712 · PMID 40141859

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a decreasing trendno p-value reported

By comparing the measurement results at different AR values, it can be observed that there is a decreasing trend of the BI results as the AR increases.

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