Understanding the Nanoindentation Edge Effect of Single-Crystal Silicon Using Molecular Dynamics Simulations.

Micromachines (Basel) · 2025 · PMC12298955 · PMID 40731723

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For indentation positions of 120 Å, 100 Å, 80 Å, and 60 Å, as the indentation position approaches the edge region, the width of material extrusion on the side of the specimen shows an increasing trend, but at 40 Å, the width of the material extrusion significantly decreases.

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