Advanced Atomic Layer Modulation Based Highly Homogeneous PtRu Precious Metals Alloy Thin Films.

Adv Sci (Weinh) · 2025 · PMC12362800 · PMID 40433901

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a decreasing trendno p-value reported

The pulsing times of the Pt precursor were set to 1, 3, 5, and 10 s, and a decreasing trend of GPC with decreasing precursor temperature was observed at all pulsing times.

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