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Investigating the impact of 3D trench structures on HfO<sub>2</sub>-based ferroelectric capacitors.

Nanoscale Adv · 2025 · PMC12477629 · PMID 41030832

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a slightly increasing trendno p-value reported
On the other hand, from planar to 3D capacitors with gradually shrinking hole diameters, their P r show a slightly increasing trend.

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Quoted from the open-access full text in Europe PMC under the licence the publisher applied. The sentence is reproduced exactly as published; the emphasis is ours.