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A Fixed-End Beam-Cantilever Piezoelectric MEMS Speaker with Flexible Supporting Layer.

Micromachines (Basel) · 2026 · PMC12942954 · PMID 41753871

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a decreasing trendno p-value reported
As the front cavity volume increases from 0.06 cm 3 to 0.34 cm 3 , the resonance frequency exhibited by SPL curves shows a decreasing trend, and the SPL gradually becomes smaller within about 20 Hz–3 kHz.

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