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Structure and Optical Properties of TiO<sub>2</sub> Films Prepared by Electron Beam Evaporation of Al<sub>2</sub>O<sub>3</sub>-Doped Ti<sub>3</sub>O<sub>5</sub>.

Materials (Basel) · 2026 · PMC13118085 · PMID 42073778

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a decreasing trendno p-value reported
For the extinction coefficient of the film, it shows a decreasing trend with the increase in Al 2 O 3 doping content after a slight increase at low doping content (2.5 at%).

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an increasing trendno p-value reported
With the increase in Al 2 O 3 doping content, the refractive index and extinction coefficient of TiO 2 films decrease continuously, while the optical band gap and surface roughness show an increasing trend.

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