RF-Sputtered β-Ga<sub>2</sub>O<sub>3</sub> Thin Films for Solar-Blind UV Detection: Progress, Challenges, and Future Perspectives.

Materials (Basel) · 2026 · PMC13208677 · PMID 42195803

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a decreasing trendno p-value reported

an increasing trendno p-value reported

Moreover, grain size measurements showed an increasing trend in grain size of samples deposited with sputtering power from 80 W to 120 W, but showed a decreasing trend for the sample deposited at 140 W.

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RF-Sputtered β-Ga&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt; Thin Films for Solar-Blind UV Detection: Progress, Challenges, and Future Perspectives.

The sentences

RF-Sputtered β-Ga<sub>2</sub>O<sub>3</sub> Thin Films for Solar-Blind UV Detection: Progress, Challenges, and Future Perspectives.