Wafer-Based Evaluation of the Effects of Center Frequency and F-Number on Lateral Resolution in Scanning Acoustic Microscopy.

Sensors (Basel) · 2026 · PMC13364238 · PMID 42451300

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An overall trend of progressively poorer lateral resolution was also observed for increasing F-number: 20 MHz (2.50 N F ), 20 MHz (4.00 N F ), and 25 MHz (5.56 N F ).

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