Development of simple designs of multitip probe diagnostic systems for RF plasma characterization.

ScientificWorldJournal · 2014 · PMC3933234 · PMID 24683326

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a decreasing trendno p-value reported

an increasing trendno p-value reported

An increasing trend was noticed in electron temperature and electron number density for increasing input RF power whilst a decreasing trend was evident in these parameters when measured against filling gas pressure.

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