Design of Higher-k and More Stable Rare Earth Oxides as Gate Dielectrics for Advanced CMOS Devices

Materials (Basel) · 2012 · PMC5448936

Europe PMC

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an obvious trendno p-value reported

An obvious trend can be found from the table: the ternary metal oxide which exhibits a larger valence state of the M ion (larger y ) shows a higher crystallization temperature.

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