TEM and STEM Studies on the Cross-sectional Morphologies of Dual-/Tri-layer Broadband SiO<sub>2</sub> Antireflective Films.

Nanoscale Res Lett · 2018 · PMC5809628 · PMID 29435672

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an increasing trendno p-value reported

Both pore size and grain size demonstrate an increasing trend from bottom layer to top layer.

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