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Rapid Processing of Wafer-Scale Anti-Reflecting 3D Hierarchical Structures on Silicon and Its Templation.

Materials (Basel) · 2018 · PMC6316734 · PMID 30567408

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an increasing trendno p-value reported
Further, as the etching time increased from 5 s to 10 s, and 20 s, an increasing trend in the reflectance was observed.

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