Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon.

Materials (Basel) · 2018 · PMC6337372 · PMID 30583577

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a decreasing trendno p-value reported

As a result, the hole profile becomes increasingly steeper, and the hole taper shows a decreasing trend with respect to the laser power within the selected range.

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