Effect of Sputtering Temperature on Fluorocarbon Films: Surface Nanostructure and Fluorine/Carbon Ratio.

Nanomaterials (Basel) · 2019 · PMC6631040 · PMID 31163587

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an increasing trendno p-value reported

The calculated F/C ratio of fluorocarbon films exhibited an increasing trend, from 0.99 to 1.24 (via 1.05 and 1.11) with the elevation of temperature from 50 to 200 °C, via 100 and 150 °C.

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