Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings.

For the attitude angle, as the temperature increased, the attitude angle of gas bearing showed an increasing trend, especially for gas bearing lubricated by He (more than 80° at 1473K), which meant the microbearings worked under the condition of low stability.

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In general, when the temperature increased, the load capacity showed a decreasing trend at different temperatures.

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