Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model.

Micromachines (Basel) · 2020 · PMC7570014 · PMID 32899110

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a decreasing trendno p-value reported

The R si showed a decreasing trend but the rate of change decreased, which indicated a similar increasing trend in substrate loss.

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