An obvious trend can be observed according to the samples in the S group that were reactive RF sputtered in an O 2 environment, that is, the percentage of RuO 3 increases as the substrate temperature increases. 3.3.
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An obvious trend can be observed according to the samples in the S group that were reactive RF sputtered in an O 2 environment, that is, the percentage of RuO 3 increases as the substrate temperature increases. 3.3.