Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure.

Micromachines (Basel) · 2020 · PMC7767028 · PMID 33419352

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a decreasing trendno p-value reported

The center frequency shows a downward trend from which it sharply drops when the radius increases more than 1.5 μm, while the band gap width has a decreasing trend for the radius less than 1.5 μm and then increased with the increase in the radius.

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