Hermeticity Analysis on SiC Cavity Structure for All-SiC Piezoresistive Pressure Sensor.

The hermeticity performance of the cavity structure is highly significant for high temperature absolute pressure sensors, which not only achieve isolation from the external environment to prevent the contamination of the diaphragm, but also provide the stable reference pressure for external pressure to obtain the accurate sensor output [ 12 , 13 , 14 ].

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