We also noted an overall trend of increasing dark current during our measurement mainly due to the laser-induced heating effects. 39 As the thermal conductivity of PET is very low (about 0.15 W m –1 K –1 ) compared to that of other silicon substrates such as SiO 2 (about 1.3 W m –1 K –1 ), the heating effects become more prominent for MoS 2 photodetectors on PET substrates. 39 Conclusions We have demonstrated a water-based mechanical lithography approach that exploits a bilayer resist structure.
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