Furthermore, the hardness of the Y 2 O 3 -doped FeCr films showed an increasing trend with Y 2 O 3 concentration, owing to the synergetic effect of dispersion strengthening and grain refinement strengthening.
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Effect of Nano-Y<sub>2</sub>O<sub>3</sub> Content on Microstructure and Mechanical Properties of Fe18Cr Films Fabricated by RF Magnetron Sputtering.
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In addition, the film thickness of the FeCr, Y 2 O 3 -FeCr, 2Y 2 O 3 -FeCr and 4Y 2 O 3 -FeCr films were 2.5, 1.5, 1.2, 1.0 μm, respectively, showing a decreasing trend with the increasing number of Y 2 O 3 slice as shown in Table 1 .