Critical Issues in Scanning Electron Microscope Metrology.

J Res Natl Inst Stand Technol · 1994 · PMC8345268 · PMID 38327698

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closest p

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extremely significantno p-value reported

Therefore, the behavior of the total number of electrons emitted from a sample for each beam electron is extremely significant to nondestructive low accelerating voltage operation and metrology [ 65 , 83 , 85 , 86 ].

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