Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations.

Micromachines (Basel) · 2021 · PMC8399550 · PMID 34442552

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a decreasing trendno p-value reported

For higher b 0 (3 and 4 μm cases), a decreasing trend is noted for the three frequencies and with only a unique drop in the fundamental when the micro-beam reaches the snap-through instability.

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