A Piezoresistive Pressure Sensor with Optimized Positions and Thickness of Piezoresistors.

As for the other two piezoresistors with same thickness moved in the Y-direction along the pressure-sensitive diaphragm with different distances to the center of the diaphragm, the values of ASD were quantified as −44.47 MPa for position 2 with a distance of 1000 μm, −82.51 MPa for position 3 with a distance of 421 μm, and −113.04 MPa for position 4 with a distance of 35 μm, which showed a decreasing trend as the distance increased.

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