Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology.

Micromachines (Basel) · 2022 · PMC8878309 · PMID 35208341

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an increasing trendno p-value reported

The diameter and depth of the silicon-based microlens showed an increasing trend as the power of the femtosecond laser increased, as shown in Figure 4 a.

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