High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO<sub>3</sub> Single-Crystal Cantilever Beams.

Micromachines (Basel) · 2022 · PMC8879162 · PMID 35208452

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an increasing trendno p-value reported

According to the reference [ 24 ], the piezoelectric coefficients may have an increasing trend within a certain range of temperatures.

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