Influences of RF Magnetron Sputtering Power and Gas Flow Rate on a High Conductivity and Low Drift Rate of Tungsten-Rhenium Thin-Film Thermocouples.

Nanomaterials (Basel) · 2022 · PMC9000736 · PMID 35407238

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a decreasing trendno p-value reported

an increasing trendno p-value reported

DT shows an increasing trend with the increase of sputtering power and a decreasing trend with the increase of gas flow rate.

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