Influence of ZnO Film Deposition Parameters on Piezoelectric Properties and Film-to-Substrate Adhesion on a GH4169 Superalloy Steel Substrate.

Micromachines (Basel) · 2022 · PMC9031343 · PMID 35457943

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an increasing trendno p-value reported

With the increase in sputtering power, the d 33 coefficient value followed an increasing trend, and the maximum value reached 4.48 pC/N.

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