Dielectric Properties Investigation of Metal-Insulator-Metal (MIM) Capacitors.

Molecules · 2022 · PMC9227371 · PMID 35745073

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Introduction As an increasing trend for next-generation radio-frequency (RF) and analog mixed-signal integrated circuits (ICs) applications, a higher level of energy storage and integration performance are required for on-chip system components to reduce chip size and fabrication cost.

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