Quantification of Aluminum Gallium Arsenide (AlGaAs) Wafer Plasma Using Calibration-Free Laser-Induced Breakdown Spectroscopy (CF-LIBS).

Molecules · 2022 · PMC9229630 · PMID 35744877

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a decreasing trendno p-value reported

an increasing trendno p-value reported

It is further observed that the plasma parameters including electron temperature and electron number density have an increasing trend with laser irradiance and a decreasing trend along the plume length up to 2 mm.

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